本发明提供了一种激光清洗器,包括激光清洗单元、声波检测单元和调节单元,激光清洗单元用于对工件进行激光清洗；声波检测单元用于对所述激光清洗单元的对焦精确度进行检测；调节单元包括驱动模块和控制模块,所述激光清洗单元和所述声波检测单元分别与所述驱动模块连接,所述声波检测单元还与所述控制模块通讯连接；所述驱动模块能够控制所述激光清洗单元和所述声波检测单元绕第一轴线旋转,并能够控制所述激光清洗单元和所述声波检测单元沿第二路径和第三路径移动,所述第一轴线、所述第一路径和所述第二路径相互垂直。本发明提供的激光清洗器,旨在实现对对焦精度的实时监控,并在对焦错位后自动纠偏。

The present invention provides a laser cleaner, including a laser cleaning unit, an acoustic wave detection unit and an adjustment unit, the laser cleaning unit is used for laser cleaning of the workpiece; the acoustic wave detection unit is used to detect the focusing accuracy of said laser cleaning unit; the adjustment unit includes a drive module and a control module, said laser cleaning unit and said acoustic wave detection unit are respectively connected to said drive module, said acoustic wave Detection unit is also connected to said control module communication; said drive module can control said laser cleaning unit and said acoustic detection unit around the first axis rotation, and can control said laser cleaning unit and said acoustic detection unit along the second path and the third path to move, said first axis, said first path and said second path perpendicular to each other. The present invention provides a laser cleaner, designed to achieve real-time monitoring of focusing accuracy, and automatic correction of misalignment after focusing.