本发明公开了一种利用空心阴极原理可涂覆于深孔和异形零件的高硬度TiN保护性涂层及其制备方法，包括如下制备步骤：(1)基体清洗：将经抛光处理后的基体分别在无水乙醇和丙酮中利用超声波清洗3～7min后，在1％～3％浓度的氢氟酸中处理5～20s；(2)基体上不同比例N、H、Ar离子蚀刻，提高基体和涂层结合强度；(3)基体上TiN涂层制备。本发明可以有效地在深孔表层沉积高质量的TiN涂层，提升TiN涂层与基材之间的结合强度，同时具有生产效率高、涂层质量好、工艺简单等优点，可应用于长径比较高的深孔类零件以及刀具、模具等承受耐磨、冲击等载荷零件的保护性涂层。

The present invention discloses a high hardness TiN protective coating and its preparation method that can be applied to deep holes and irregular parts using the principle of hollow cathode, including the following preparation steps: (1) substrate cleaning: the polished substrate is cleaned with ultrasonic waves in anhydrous ethanol and acetone for 3-7 minutes, and then treated in 1% -3% concentration of hydrofluoric acid for 5-20 seconds; (2) Etching with different ratios of N, H, and Ar ions on the substrate to improve the bonding strength between the substrate and the coating; (3) Preparation of TiN coating on the substrate. The present invention can effectively deposit high-quality TiN coating on the surface of deep holes, improve the bonding strength between TiN coating and substrate, and have the advantages of high production efficiency, good coating quality, and simple process. It can be applied to deep hole parts with high aspect ratio, as well as protective coatings for parts such as cutting tools and molds that withstand wear and impact loads.