本实验采用的是美国赛默飞公司生产的K-Alpha多功能X-射线光电子能谱仪，分析室工作时的真空度约3×10-7 torr，X光源：单色化的Al Kα源（Mono Al Kα ），能量：1486.6 eV，6 mA×12 KV，束斑大小：400 μm；扫描模式：固定分析器能量（CAE），全谱扫描：通能为150 eV，窄谱扫描：通能为50 eV结合能校正：以表面污染C1s（284.8 eV）为标准进行校正。

In this experiment, K-Alpha multifunctional X-ray photoelectron spectrometer produced by Thermo Field Company of the United States was used. The vacuum degree of the analysis chamber was about 3×10-7 torr. The X-ray source was monochromatic Al Kα source (Mono Al Kα), the energy was 1486.6 eV, 6 mA×12 KV, and the beam spot size was as follows: 400 μm; Scanning mode: Fixed Analyzer Energy (CAE), full spectrum scanning: universal energy 150 eV, narrow spectrum scanning: universal energy 50 eV Binding energy correction: Surface contamination C1s (284.8 eV) as the standard for correction.